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[IEEE 2011 Winter Simulation Conference - (WSC 2011) - Phoenix, AZ, USA (2011.12.11-2011.12.14)] Proceedings of the 2011 Winter Simulation Conference (WSC) - Simulation-based framework to Automated Wet-etch station scheduling problems in the semiconductor industry
Aguirre, Adrian M., Cafaro, Vanina G., Mendez, Carlos A.Year:
2011
Language:
english
DOI:
10.1109/wsc.2011.6147896
File:
PDF, 811 KB
english, 2011