Observing the effect of water vapor on post-irradiated...

Applied Surface Science 2008 Vol. 254; Iss. 13

Observing the effect of water vapor on post-irradiated surface morphology of SiO2 and Si3N4 insulators by atomic force microscopy

You-Lin Wu, Jing-Jenn Lin, Chiung-Yi Huang, Shi-Tin Lin
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Volume:
254
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2007.12.059
File:
PDF, 1.48 MB
english, 2008
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