Influence of ZrO2 in HfO2 on reflectance of HfO2/SiO2...

Applied Surface Science 2008 Vol. 254; Iss. 15

Influence of ZrO2 in HfO2 on reflectance of HfO2/SiO2 multilayer at 248 nm prepared by electron-beam evaporation

Jingmei Yuan, Lei Yuan, Hongbo He, Kui Yi, Zhengxiu Fan, Jianda Shao
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Volume:
254
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2008.01.171
File:
PDF, 167 KB
english, 2008
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