A study on electrical and mechanical properties of hybrid-polymer thin films by a controlled TEOS bubbling ratio
S.-J. Cho, I.-S. Bae, H.-D. Jeong, J.-H. BooVolume:
254
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2008.02.095
File:
PDF, 510 KB
english, 2008