Structural characterization of SiGe nanoclusters formed by...

Structural characterization of SiGe nanoclusters formed by rapid thermal annealing

Alexandre Miranda P. dos Anjos, Ioshiaki Doi, José Alexandre Diniz
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Volume:
254
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2008.02.119
File:
PDF, 381 KB
english, 2008
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