Leakage current study of Si1−xCx embedded source/drain...

Applied Surface Science 2008 Vol. 254; Iss. 19

Leakage current study of Si1−xCx embedded source/drain junctions

E. Simoen, B. Vissouvanadin, N. Taleb, M. Bargallo Gonzalez, P. Verheyen, R. Loo, C. Claeys, V. Machkaoutsan, M. Bauer, S. Thomas, J.P. Lu, R. Wise
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Volume:
254
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2008.02.138
File:
PDF, 469 KB
english, 2008
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