![](/img/cover-not-exists.png)
Influence of RF power and fluorine doping on the properties of sputtered ITO thin films
M. Nisha, M.K. JayarajVolume:
255
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2008.06.019
File:
PDF, 325 KB
english, 2008