Influence of RF power and fluorine doping on the properties...

Influence of RF power and fluorine doping on the properties of sputtered ITO thin films

M. Nisha, M.K. Jayaraj
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Volume:
255
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2008.06.019
File:
PDF, 325 KB
english, 2008
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