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Dependence of N2 pressure on the crystal structure and surface quality of AlN thin films deposited via pulsed laser deposition technique at room temperature
Gaurav Shukla, Alika KhareVolume:
255
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2008.06.190
File:
PDF, 1.09 MB
english, 2008