Analysis of interface layers by spectroscopic ellipsometry

Applied Surface Science 2008 Vol. 255; Iss. 3

Analysis of interface layers by spectroscopic ellipsometry

T.J. Kim, J.J. Yoon, Y.D. Kim, D.E. Aspnes, M.V. Klein, D.-S. Ko, Y.-W. Kim, V.C. Elarde, J.J. Coleman
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Volume:
255
Year:
2008
Language:
english
Pages:
3
DOI:
10.1016/j.apsusc.2008.07.005
File:
PDF, 282 KB
english, 2008
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