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Microstructure and properties of nanocrystalline titanium monoxide films synthesized by inductively coupled plasma assisted reactive direct current magnetron sputtering
Z.G. Li, S. Miyake, M. Makino, Y.X. WuVolume:
255
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2008.07.108
File:
PDF, 836 KB
english, 2008