Multi-length scale Monte Carlo simulation of the growth...

Applied Surface Science 2008 Vol. 255; Iss. 5-part-P2

Multi-length scale Monte Carlo simulation of the growth process of SiC film by chemical vapor deposition

C.X. Liu, Y.Q. Yang, X. Luo, R.J. Zhang, B. Huang
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Volume:
255
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.apsusc.2008.09.051
File:
PDF, 2.03 MB
english, 2008
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