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Structure and gas-barrier properties of amorphous hydrogenated carbon films deposited on inner walls of cylindrical polyethylene terephthalate by plasma-enhanced chemical vapor deposition
Jing Li, Chunzhi Gong, Xiubo Tian, Shiqin Yang, Ricky K.Y. Fu, Paul K. ChuVolume:
255
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2008.10.064
File:
PDF, 890 KB
english, 2009