![](/img/cover-not-exists.png)
MOCVD of zirconium oxide thin films: Synthesis and characterization
A.M. Torres-Huerta, M.A. Domínguez-Crespo, E. Ramírez-Meneses, J.R. Vargas-GarcíaVolume:
255
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2008.11.059
File:
PDF, 583 KB
english, 2009