![](/img/cover-not-exists.png)
Growth and properties of YAlO film synthesized by RF magnetron sputtering
Keiko Matsunouchi, Naoyoshi Komatsu, Chiharu Kimura, Hidemitsu Aoki, Takashi SuginoVolume:
255
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2008.12.058
File:
PDF, 478 KB
english, 2009