In situ spatial-profile monitoring of beam flux of neutral...

Applied Surface Science 2009 Vol. 255; Iss. 24

In situ spatial-profile monitoring of beam flux of neutral free radicals produced by photo-deionization of negative ion beams

Keiji Hayashi, Daisuke Tanaka, Harumi Araki, Tomoki Maruyama, Daisuke Matsumura, Kazuho Toyoda, Noriyuki Tsuji
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Volume:
255
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2009.04.085
File:
PDF, 220 KB
english, 2009
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