Low pressure chemical vapor deposition of niobium coating...

Applied Surface Science 2009 Vol. 255; Iss. 20

Low pressure chemical vapor deposition of niobium coating on silicon carbide

Qiaomu Liu, Litong Zhang, Laifei Cheng, Jinling Liu, Yiguang Wang
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Volume:
255
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2009.06.037
File:
PDF, 487 KB
english, 2009
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