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Microstructure and tribological properties of TiN, TiC and Ti(C, N) thin films prepared by closed-field unbalanced magnetron sputtering ion plating
Guojun Zhang, Bin Li, Bailing Jiang, Fuxue Yan, Dichun ChenVolume:
255
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2009.06.090
File:
PDF, 542 KB
english, 2009