Effect of additives for higher removal rate in lithium...

Applied Surface Science 2010 Vol. 256; Iss. 6

Effect of additives for higher removal rate in lithium niobate chemical mechanical planarization

Sukhoon Jeong, Hyunseop Lee, Hanchul Cho, Sangjik Lee, Hyoungjae Kim, Sungryul Kim, Jaehong Park, Haedo Jeong
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Volume:
256
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2009.09.094
File:
PDF, 1.13 MB
english, 2010
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