Laser crystallization of amorphous silicon films...

Laser crystallization of amorphous silicon films investigated by Raman spectroscopy and atomic force microscopy

Jing Jin, Zhijun Yuan, Lu Huang, Sheng Chen, Weimin Shi, Zechun Cao, Qihong Lou
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Volume:
256
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2009.12.052
File:
PDF, 430 KB
english, 2010
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