Mechanical properties of the plasma-enhanced magnetron...

Applied Surface Science 2010 Vol. 257; Iss. 1

Mechanical properties of the plasma-enhanced magnetron sputtering Si–C–N coatings

Yanfeng Wang, Zhengxian Li, Jihong Du, Baoyun Wang
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Volume:
257
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2010.06.050
File:
PDF, 441 KB
english, 2010
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