Effect of substrate bias and temperature on magnetron...

Applied Surface Science 2011 Vol. 257; Iss. 6

Effect of substrate bias and temperature on magnetron sputtered CrSiN films

Shuyong Tan, Xuhai Zhang, Xiangjun Wu, Feng Fang, Jianqing Jiang
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Volume:
257
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2010.08.114
File:
PDF, 777 KB
english, 2011
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