Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate
Zefang Zhang, Weili Liu, Jingkang Zhu, Zhitang SongVolume:
257
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2010.09.009
File:
PDF, 1.15 MB
english, 2010