The research on mechanical effect etching Si in pulsed...

Applied Surface Science 2011 Vol. 257; Iss. 8

The research on mechanical effect etching Si in pulsed laser micromaching under water

Long Yuhong, Xiong Liangcai, Shi Tielin
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Volume:
257
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2010.11.105
File:
PDF, 379 KB
english, 2011
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