A multi-degree-of-freedom micromirror utilizing...

A multi-degree-of-freedom micromirror utilizing inverted-series-connected bimorph actuators

Todd, Shane T, Jain, Ankur, Qu, Hongwei, Xie, Huikai
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Volume:
8
Language:
english
Journal:
Journal of Optics A: Pure and Applied Optics
DOI:
10.1088/1464-4258/8/7/s10
Date:
July, 2006
File:
PDF, 907 KB
english, 2006
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