A multi-degree-of-freedom micromirror utilizing inverted-series-connected bimorph actuators
Todd, Shane T, Jain, Ankur, Qu, Hongwei, Xie, HuikaiVolume:
8
Language:
english
Journal:
Journal of Optics A: Pure and Applied Optics
DOI:
10.1088/1464-4258/8/7/s10
Date:
July, 2006
File:
PDF, 907 KB
english, 2006