Effects of oxygen partial pressure and substrate...

Effects of oxygen partial pressure and substrate temperature on the structure and optical properties of MgxZn1−xO thin films prepared by magnetron sputtering

Xinghua Zhang, Zunming Lu, Fanbin Meng, Yongzhong Wang, Ying Li, Xiao Yu, Chengchun Tang
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Volume:
257
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2011.02.076
File:
PDF, 590 KB
english, 2011
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