Synthesis and characterization of porous crystalline SiC...

Applied Surface Science 2011 Vol. 257; Iss. 15

Synthesis and characterization of porous crystalline SiC thin films prepared by radio frequency reactive magnetron sputtering technique

Afzaal Qamar, Arshad Mahmood, Tuba Sarwar, Nadeem Ahmed
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Volume:
257
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2011.03.033
File:
PDF, 903 KB
english, 2011
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