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An undercutting model of atomic oxygen for multilayer silica/alumina films fabricated by plasma immersion implantation and deposition on polyimide
Yongxian Huang, Xiubo Tian, Shixiong Lv, Shiqin Yang, R.K.Y. Fu, Paul K. Chu, Jinsong Leng, Yao LiVolume:
257
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2011.05.124
File:
PDF, 1.10 MB
english, 2011