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Investigations on residual chemical contamination on machining aluminum components of turbo molecular pumps
Vinci, Andrea, Pelissier, Bernard, Le Guet, Catherine, Fontaine, Hervé, Mathes, Rainer, Inglebert, René-LouisVolume:
110
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2014.07.031
Date:
December, 2014
File:
PDF, 3.25 MB
english, 2014