Direct tunneling gate leakage current in transistors with...

IEEE Electron Device Letters 2000 / 11 Vol. 21; Iss. 11

Direct tunneling gate leakage current in transistors with ultrathin silicon nitride gate dielectric

Yee Chia Yeo,, Qiang Lu,, Wen Chin Lee,, Tsu-Jae King,, Chenming Hu,, Xiewen Wang,, Xin Guo,, Ma, T.P.
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Volume:
21
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/55.877204
Date:
November, 2000
File:
PDF, 99 KB
english, 2000
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