Effect of Antenna Diameter on the Characteristics of...

Effect of Antenna Diameter on the Characteristics of Internal-Type Linear Inductively Coupled Plasma

Lim, Jong Hyeuk, Kim, Kyong Nam, Gweon, Gwang Ho, Hong, Seung Pyo, Yeom, Geun Young
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Volume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.48.096002
Date:
September, 2009
File:
PDF, 284 KB
english, 2009
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