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[IEEE 2012 IEEE International Frequency Control Symposium (FCS) - Baltimore, MD, USA (2012.05.21-2012.05.24)] 2012 IEEE International Frequency Control Symposium Proceedings - Thermally-actuated and piezoresistively-sensed CMOS-MEMS resonator array using differential-mode operation
Chen, Cheng-Chi, Li, Ming-Huang, Chen, Wen-Chien, Yu, Huan-Tse, Li, Sheng-ShianYear:
2012
Language:
english
DOI:
10.1109/fcs.2012.6243711
File:
PDF, 2.36 MB
english, 2012