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Study of silicon-silicon nitride interface properties on planar (1 0 0), planar (1 1 1) and textured surfaces using deep-level transient spectroscopy
Gong, Chun, Simoen, Eddy, Posthuma, Niels E, Van Kerschaver, Emmanuel, Poortmans, Jef, Mertens, RobertVolume:
43
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/43/48/485301
Date:
December, 2010
File:
PDF, 901 KB
english, 2010