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Raman Spectrum Curve Fitting for Estimating Surface Stress Distribution in Single-Crystal Silicon Microstructure
Komatsubara, Mamoru, Namazu, Takahiro, Nagai, Yuji, Inoue, Shozo, Naka, Nobuyuki, Kashiwagi, Shinsuke, Ohtsuki, KunioVolume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.48.04c021
Date:
April, 2009
File:
PDF, 560 KB
english, 2009