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DEPOSITION AND CHARACTERIZATION OF TiN-COATED STEELS AT VARIOUS N 2 GAS FLOW RATES WITH CONSTANT ETCHING BY USING CAPVD TECHNIQUE
ALI, MUBARAK, HAMZAH, ESAH BINTI, TOFF, MOHD RADZI HJ. MOHDVolume:
14
Language:
english
Journal:
Surface Review and Letters
DOI:
10.1142/s0218625x07009104
Date:
February, 2007
File:
PDF, 520 KB
english, 2007