Deconstructing Energy Use in Microelectronics...

Environmental Science & Technology 2010 / 06 Vol. 44; Iss. 11

Deconstructing Energy Use in Microelectronics Manufacturing: An Experimental Case Study of a MEMS Fabrication Facility

Branham, Matthew S., Gutowski, Timothy G.
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Volume:
44
Language:
english
Journal:
Environmental Science & Technology
DOI:
10.1021/es902388b
Date:
June, 2010
File:
PDF, 1.42 MB
english, 2010
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