Angular distribution of particles sputtered from metals and...

Angular distribution of particles sputtered from metals and alloys

Wucher, A.
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Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575582
Date:
July, 1988
File:
PDF, 482 KB
english, 1988
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