Data Mining for Optimizing IC Feature Designs to Enhance...

IEEE Transactions on Semiconductor Manufacturing 2014 / 02 Vol. 27; Iss. 1

Data Mining for Optimizing IC Feature Designs to Enhance Overall Wafer Effectiveness

Chien, Chen-Fu, Hsu, Chia-Yu
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Volume:
27
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2013.2291838
Date:
February, 2014
File:
PDF, 1.02 MB
english, 2014
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