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Polydimethylsiloxane Microlens Arrays Fabricated Through Liquid-Phase Photopolymerization and Molding
Xuefeng Zeng,, Hongrui Jiang,Volume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2008.926139
Date:
October, 2008
File:
PDF, 795 KB
english, 2008