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Development and Testing of a Multilevel Chevron Actuator-Based Positioning System
Oak, Sahil, Rawool, Sandesh, Sivakumar, Ganapathy, Hendriske, Egbert J., Buscarello, Daniel, Dallas, TimVolume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2011.2167674
Date:
December, 2011
File:
PDF, 1.81 MB
english, 2011