Multi-degree-of-freedom displacement measurement system for milli-structures
Bae, Eui Won, Kim, Jong-Ahn, Kim, Soo HyunVolume:
12
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/12/9/316
Date:
September, 2001
File:
PDF, 302 KB
english, 2001