Reactive Ion Etching and Ion Beam Etching for Ferroelectric...

Integrated Ferroelectrics 2004 / 08 Vol. 61; Iss. 1

Reactive Ion Etching and Ion Beam Etching for Ferroelectric Memories

SHAO, TIAN-QI, REN, TIAN-LING, LIU, LI-TIAN, ZHU, JUN, LI, ZHI-JIAN
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
61
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580490459288
Date:
August, 2004
File:
PDF, 179 KB
english, 2004
Conversion to is in progress
Conversion to is failed