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[IEEE 2013 IEEE Pulsed Power and Plasma Science Conference (PPPS 2013) - San Francisco, CA, USA (2013.06.16-2013.06.21)] 2013 19th IEEE Pulsed Power Conference (PPC) - Study of CF4 capacitive plasma chemistry through mass spectrometry technique and global model
Toneli, D. A., Pessoa, R. S., Roberto, M., Petraconi, G., Maciel, H. S.Year:
2013
Language:
english
DOI:
10.1109/ppc.2013.6627595
File:
PDF, 763 KB
english, 2013