Mechanistic insight into gas-phase reactions of hydrogen...

Journal of the American Chemical Society 1993 / 05 Vol. 115; Iss. 9

Mechanistic insight into gas-phase reactions of hydrogen atom with disilane and hydrogen atom etching of silicon surfaces

Dobbs, Kerwin D., Doren, Douglas J.
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Volume:
115
Language:
english
Journal:
Journal of the American Chemical Society
DOI:
10.1021/ja00062a044
Date:
May, 1993
File:
PDF, 947 KB
english, 1993
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