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On-Chip Variable Inductor Using Microelectromechanical Systems Technology
Yokoyama, Yoshisato, Fukushige, Takashi, Hata, Seiichi, Masu, Kazuya, Shimokohbe, AkiraVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.42.2190
Date:
April, 2003
File:
PDF, 298 KB
english, 2003