Nanometer scale patterning and pattern transfer on amorphous Si, crystalline Si, and SiO[sub 2] surfaces using self-assembled monolayers
Wang, Dawen, Thomas, Shawn G., Wang, Kang L., Xia, Younan, Whitesides, George M.Volume:
70
Year:
1997
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.118625
File:
PDF, 467 KB
english, 1997