SnO2 thin films grown by atomic layer deposition using a...

Applied Surface Science 2014 / 11 Vol. 320

SnO2 thin films grown by atomic layer deposition using a novel Sn precursor

Choi, Min-Jung, Cho, Cheol Jin, Kim, Kwang-Chon, Pyeon, Jung Joon, Park, Hyung-Ho, Kim, Hyo-Suk, Han, Jeong Hwan, Kim, Chang Gyoun, Chung, Taek-Mo, Park, Tae Joo, Kwon, Beomjin, Jeong, Doo Seok, Baek,
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Volume:
320
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.09.054
Date:
November, 2014
File:
PDF, 3.82 MB
english, 2014
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