One-dimensional solution for electron heating in an...

One-dimensional solution for electron heating in an inductively coupled plasma discharge

Yoon, N. S., Kim, S. S., Chang, C. S., Choi, Duk-In
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Volume:
54
Language:
english
Journal:
Physical Review E
DOI:
10.1103/physreve.54.757
Date:
July, 1996
File:
PDF, 239 KB
english, 1996
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