Novel design and sensitivity analysis of displacement...

Review of Scientific Instruments 2014 / 09 Vol. 85; Iss. 9

Novel design and sensitivity analysis of displacement measurement system utilizing knife edge diffraction for nanopositioning stages

Lee, ChaBum, Lee, Sun-Kyu, Tarbutton, Joshua A.
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Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4895912
Date:
September, 2014
File:
PDF, 1.38 MB
english, 2014
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