Sputtering and Etching of GaN Surfaces

Journal of Physical Chemistry B 2001 / 10 Vol. 105; Iss. 41

Sputtering and Etching of GaN Surfaces

Lai, Ying-Huang, Yeh, Chuin-Tih, Hwang, Jung-Min, Hwang, Huey-Liang, Chen, Chien-Te, Hung, Wei-Hsiu
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Volume:
105
Language:
english
Journal:
The Journal of Physical Chemistry B
DOI:
10.1021/jp011728k
Date:
October, 2001
File:
PDF, 172 KB
english, 2001
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