[IEEE 2008 Symposium on Design, Test, Integration and...

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[IEEE 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (MEMS/MOEMS) - Nice, France (2008.04.9-2008.04.11)] 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Micro-tensile tests on micromachined metal on polymer specimens: Elasticity, plasticity and rupture

Seguineau, C., Ignat, M., Malhaire, C., Brida, S., Lafontan, X., Desmarres, J.-M., Josserond, C., Debove, L.
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Year:
2008
Language:
english
DOI:
10.1109/dtip.2008.4752941
File:
PDF, 2.29 MB
english, 2008
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